화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.2, 614-618, 2010
Synthesis of SrSnO3 thin films by pulsed laser deposition deposition temperature
SrSnO3 thin films were prepared by pulsed laser deposition on amorphous silica and single crystal substrates of R-sapphire (100)LaAlO3 and (100)SrTiO3 High quality epitaxial (100) oriented films were obtained on LaAlO3 and SrTiO3 while a texture was revealed for films on sapphire deposited at the same deposition temperature of 700 degrees C Amorphous films were obtained on silica but a post annealing at 800 degrees C induced crystallization with a random orientation The screening of deposition temperature showed epitaxial features on SrTiO3 from 650 C while no crystallization was observed at 600 C The influence of substrate and deposition temperature was confirmed by Scanning Electron Microscopy and Atomic Force Microscopy observations (C) 2010 Elsevier B V All rights reserved