화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.2, 952-955, 2010
Dissolution kinetics of Si into Ge (111) substrate on the nanoscale
In this paper we present experiments and simulations on the dissolution of Si into single crystalline Ge(111) substrates The interface shift during the dissolution was tracked by X-ray Photoelectron Spectroscopy It was obtained that the Interface remained sharp and shifted according to anomalous kinetics similarly to our previous measurement in the Si/amorphous-Ge system The interface shift x can be described by a power function of time x proportional to t(kc) with a kinetic exponent k(c) of 0 85 +/- 0 1 larger than the one measured for the amorphous system (0 7 0 1) Both exponents however are different from the k(c) = 0 5 Fickian (parabolic) value and It is interpreted as a nanoscale diffusional anomaly caused by the strong composition dependence of the diffusion coefficients (C) 2010 Elsevier B V All rights reserved