화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.9, 2737-2741, 2011
Near infra-red Mueller matrix imaging system and application to retardance imaging of strain
We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to retardance imaging of strain in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers. (C) 2011 Elsevier B.V. All rights reserved.