This article summarizes our progress made on an aqueous chemical solution deposition method used for the deposition of photocatalytically active TiO2 thin films. Starting from Titanium(IV)butoxide we achieved a stable titanium precursor solution containing titanium-peroxo compounds by reaction between Titanium(IV) butoxide and hydrogen peroxide. We were able to deposit anatase TiO2 films with good optical transparency and abrasion resistance. Dip-coating was used to deposit thin films on glass substrates from the solution. The occurring reaction mechanism was examined via thermal analysis, mass spectrometry and Raman spectroscopy. Decomposition of organic polluents was confirmed by the breakdown of ethanol. The obtained results show promising possibilities of this low-carbon containing synthesis method towards transparent, photocatalytic coatings. Presence of carbon was minimized by avoiding organic complexing agents. These materials are of great importance in the synthesis of self-cleaning materials. (C) 2011 Elsevier B.V. All rights reserved.