In this study, the titanium plates, which were modified by NaOH alkali solution, were associated with 3-Aminopropyltriethoxysilane (APTES) films using self-assembled monolayers (SAMs). The surfaces of titanium before and after modification were characterized by scanning electronic microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and attenuated total refraction-Fourier transform infrared spectroscopy (ATR-FTIR). After bonding the AFTES films on the modification titanium, the new peaks located around 1095 cm(-1) attributes to siloxane groups indicating that silane agent had been grafted onto the surface of the modification titanium substrate by SAMs. Following the deposition of APTES films on titanium, significant change were seen in the amounts of oxygen, silicon and carbon present on the titanium surface, which were consistent with the anticipated reaction steps. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.