Unique structures of TiO2 films were prepared on F-doped SnO2 transparent conductive films in aqueous solutions. They were then covered with dye-labeled proteins. Firstly, influence of film thickness on photoluminescence intensity (PL) and photocurrent (PC) was investigated. PL and PC were improved with the decrease of film thickness. Especially, PC was drastically improved to more than 30 times with the decrease of film thickness. Secondly, a novel technique of solution aging method was applied to form TiO2 structures. PC was successfully improved with this technique. They were candidate materials for bio-semiconductor hybrid devices such as protein sensors. (C) 2011 Elsevier B.V. All rights reserved.