This study demonstrates liquid crystal (LC) alignment on Al2O3 films using the ion-beam (IB) method as well as the optimization of the IB irradiation condition. Uniform LC alignment was achieved at an IB incident energy of 1800 eV with an IB incident angle of 45 degrees, while inferior LC alignments were observed in other tested conditions. The pretilt angles and transmittances of the LC cell were also shown as part of the same trend for the LC alignment states. This result was subject to van der Waals forces which were caused by topographical changes during the IB process. (C) 2011 Elsevier B.V. All rights reserved.