Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

Ristoscu C; Ghica C; Papadopoulou EL; Socol G; Gray D; Mironov B; Mihailescu IN; Fotakis C

Thin Solid Films, Vol.519, No.19, 6381-6387, 2011

DOI10.1016/j.tsf.2011.04.065 Export Citation

Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

Ristoscu C, Ghica C, Papadopoulou EL, Socol G, Gray D, Mironov B, Mihailescu IN, Fotakis C

We studied the effect of temporally pulse shaping upon the properties of thin layers synthesized by pulsed laser deposition with fs laser pulses generated by a Ti-sapphire laser source. We showed that the film morphology and structure can be gradually modified when applying mono-pulses of different duration or passing to a sequence of two pulses of different intensities. (C) 2011 Elsevier B.V. All rights reserved.

Keywords:Aluminum nitride;Pulsed laser deposition;Femto second lasers;Laser pulse shape;Nanostructured thin films