Quaternary Zn(1-x-y)Mg(x)Sr(y)O films were grown and characterized in detail, which were observed to be lattice matched to the ZnO by the X-ray diffraction (XRD). Cathodoluminescence measurement showed that near-band UV emission peaks of the samples move toward higher energy as concentration of Mg and Sr increases, to 3.67 eV for the Zn(0.87)Mg(0.08)Sr(0.50)O and to 4.02 eV for the Zn(0.72)Mg(0.17)Sr(0.11)O. It was also observed by the scanning electron microscopy and the XRD that the films are single crystalline. It is believed that the ZnMgSrO films would be one of the important candidate materials for the high quality deep-UV optoelectronic devices. (C) 2011 Elsevier B.V. All rights reserved.