The influence of the average Se-to-metal overpressure during three-stage co-evaporation of Cu(InxGa1-x)Se-2 solar absorber layers has been investigated. Solar cell devices were fabricated using a baseline process consisting of chemical bath deposited CdS, magnetron sputtered intrinsic and Al-doped ZnO, and e-beam evaporated Ni/Al/Ni current collection grid. For the higher Se-to-metal rate ratios studied, an increased short-circuit current in combination with a decreased fill factor is observed, while the open-circuit voltage stays fairly constant. Based on quantum efficiency measurements, fitting of IV data to a one-diode model, and simulations, we suggest the observed effects to be due to a decreased effective doping in combination with a decreased bulk recombination with higher average Se-to-metal overpressures. This could e.g. be explained by a decreasing number of Se-vacancies or V-Se-V-Cu divacancies with higher Se rate. For the range of lower average Se-to-metal rate ratios studied, device performance drops due to a decreased open-circuit voltage and, for the lowest Se rate investigated, fill factor. In addition to electrical characterization, the effects on absorber microstructure are discussed based on results obtained from X-ray diffraction and scanning electron microscopy. (C) 2011 Elsevier B.V. All rights reserved.