FePd and CoPd alloy thin films were prepared on MgO single-crystal substrates of (001)(B1), (110)(B1), and (111)(B1) orientations at 600 degrees C by ultra high vacuum rf magnetron sputtering. L1(0)-FePd(001) films with the c-axis perpendicular to the substrate surface are obtained on MgO(001)(B1) substrates. FePd epitaxial films consisting of L1(0)(110) and L1(0)(011) crystals are formed on MgO(110)(B1) substrates. The c-axis of L1(0)(110) crystal is parallel to the substrate surface, whereas that of L1(0)(011) crystal is 44 degrees canted from perpendicular direction. L1(0)-FePd(111) films with the c-axis 54 degrees canted from the perpendicular direction are formed on MgO (111)(B1) substrates. L1(0) ordering degree of these FePd films varies depending on the substrate orientation. On the other hand, disordered CoPd thin films of (001)(A1), (110)(A1), and (111)(A1) orientations epitaxially grow on MgO substrates of (001)(B1), (110)(B1), and (111)(B1) orientations, respectively. The magnetization properties of L1(0) ordered FePd and A1 disordered CoPd thin films are influenced by the crystal structure, the ordering degree, and the film orientation. (C) 2011 Elsevier B.V. All rights reserved.