The liquid-delivery spin metal-organic chemical vapor phase deposition method was used to grow epitaxial sodium-bismuth-titanate films of the system Bi(4)Ti(3)O(12)+ xNa(0.5)Bi(0.5)TiO(3) on SrTiO(3)(001) substrates. Na(thd). Ti(O(i)Pr)(2)(thd)(2) and Bi(thd)(3), solved in toluene, were applied as source materials. Depending on the substrate temperature and the Na/Bi ratio in the gas phase several structural phases of sodium-bismuth-titanate were detected. With increasing temperature and/or Na/Bi ratio, phase transitions from an Aurivillius phase with m = 3 to m = 4 via an interleaved state with m=3.5, and, finally, to Na(0.5)Bi(0.5)TiO(3) with perovskite structure (m=infinity) were established. These phase transitions proceed at remarkably lower temperatures than in ceramics or bulk crystals for which they had been exclusively observed so far. (C) 2011 Elsevier B.V. All rights reserved.