화학공학소재연구정보센터
Thin Solid Films, Vol.520, No.2, 700-702, 2011
Influence of substrate conductivity type on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy
It is shown that the conductivity of the substrate has a non negligible effect on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy. The growth experiments have been done on the systems GaAs/GaAs, GaAlSb/GaSb and GaInAsSb/GaSb. To insure strictly the same growth conditions the growth was done simultaneously, from the same liquid phase, on the different substrates. (C) 2011 Elsevier B.V. All rights reserved.