Structural Analysis of High Molecular Weight PMSQs and Their Related Properties for Interlayer Dielectric (ILD) Application

He Seung Lee; Seung-Sock Choi; Kyung-Youl Baek; Eung Chan Lee; Soon Man Hong; Jong-Chan Lee; Seung Sang Hwang

Macromolecular Research, Vol.20, No.11, 1131-1136, November, 2012

DOI10.1007/s13233-012-0168-1 Export Citation

Structural Analysis of High Molecular Weight PMSQs and Their Related Properties for Interlayer Dielectric (ILD) Application

He Seung Lee^{1, 2}, Seung-Sock Choi^{1, 3}, Kyung-Youl Baek^{1, 3}, Eung Chan Lee^{1, 3}, Soon Man Hong^{1, 3}, Jong-Chan Lee^{2, †}, and Seung Sang Hwang^{1, 3}

¹Nanohybrids Research Center, Korea Institute of Science Technology, Seoul, 136-791, Korea
²Department of Chemical and Biological Engineering, Seoul National University, Seoul, 151-744, Korea
³, Korea

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A series of high molecular weight polymethylsilsesquioxanes (PMSQs) were synthesized through polymerization of an isolated hydroxyl-substituted cyclic siloxane stereoisomer, cis-trans-cis 1,3,5,7 tetramethyl 1,3,5,7 tetrahydroxyl cyclosiloxane, for interlayer dielectric (ILD) application as low dielectric materials. The molecular weights of PMSQs were controlled by varying polycondensation time. Structural analyses of the obtained PMSQs were carried out by gel chromatography (GPC), FTIR, 29Si NMR, static light scattering (SLS), solution X-ray scattering, and X-ray diffraction. The change in molecular shape of the PMSQs went from linear to branched in structure as molecular weight increased. Furthermore, thin film properties were investigated for application as interlayer dielectric materials. As structural branching increased, its properties showed isotropic tendencies, relatively high modulus (5.4 GPa), and low dielectric constant (2.74) with increase in the inter-molecular space.

Keywords:polymethylsilsesquioxane;high molecular weight;polymer shape;dielectric.

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[1] Morgen M, Ryan ET, Zhao J, Hu C, Cho T, Ho PS, Annu. Rev. Mater. Sci., 30, 645 (2000)

[2] Voit B, J. Polym. Sci. A: Polym. Chem., 38(14), 2505 (2000)

[3] Mathews AS, Kim I, Ha CS, Macromol. Res., 15(2), 114 (2007)

[4] Cha BJ, Kim S, Char K, Macromol. Res., 13(3), 176 (2005)

[5] Lee D, Kim YA, Kim YB, Kim JK, Han YK, Macromol. Res., 16(4), 353 (2008)

[6] Rankin SE, Kasehagen LJ, McCormick AV, Macosko CW, Macromolecules, 33(20), 7639 (2000)

[7] Mackenzie JD, J. Non-Cryst. Solids., 100, 162 (1988)

[8] Lee JK, Char K, Rhee HW, Ro HW, Yoo DY, Yoon DY, Polymer, 42(21), 9085 (2001)

[9] Lee LH, Chen WC, Liu WC, J. Polym. Sci. A: Polym. Chem., 40(10), 1560 (2002)

[10] Hacker NP, Davis G, Figge L, Krajewski T, Lefferts S, Nedbal J, Spear R, Mat. Res. Soc. Symp. Proc., 476, 25 (1997)

[11] Bolze J, Kim J, Huang JY, Rah S, Youn HS, Lee B, Shin TJ, Ree M, Macromol. Res., 10(1), 2 (2002)

[12] Lee HS, Choi SS, Baek KY, Hong SM, Lee EC, Lee JC, Hwang SS, Eur. Polym. J., 48, 1073 (2012)

[13] Tverdokhlebova II, Larina TA, Russ Chem Rev., 44, 170 (1975)

[14] Park ES, Ro HW, Nguyen CV, Jaffe RL, Yoon DY, Chem. Mater., 20, 1548 (2008)

[15] Chiu YC, Ma CCM, Liu FY, Chou IC, Chaing CL, Yang JC, J. Appl. Polym. Sci., 114, 3 (2009)

[16] Hoque MA, Kakihana Y, Shinke S, Kawakami Y, Macromolecules, 42(9), 3309 (2009)

[17] Chang S, Matsumoto T, Matsumoto H, Unno M, Appl.Organomet. Chem., 24, 241 (2010)

[18] Jana C, Jayamurugan G, Ganapathy R, Maiti PK, Jayaraman N, Sood AK, J. Chem. Phys., 124, 204719 (2006)

[19] De Luca E, Richards RW, J. Polym. Sci. B: Polym. Phys., 41(12), 1339 (2003)

[20] Mikoshiba S, Hayase S, J. Mat. Chem., 9, 591 (1999)

[21] Kim BR, Kang JW, Lee KY, Son JM, Ko MJ, J. Mater. Sci., 42(12), 4591 (2007)

[22] Rubinstein MC, Ralph H, Polymer Physics. Oxford, Oxford University Press, New York (2003)