An overview and evaluation of different technologies is presented, which can be applied to remove problematic silane and siloxane compounds from exhaust air. In a lab screening, 96?% H2SO4 was identified to be the most efficient and practical absorbent to remove hexamethyldisiloxane (HMDSO) from exhaust air. Lab scale results were transferred to pilot scale, where the superiority of 96?% H2SO4 in comparison with a previously used scrubber solution (NaOH/MeOH) was demonstrated. In several large scale experiments, the elimination factors of HMDSO from different exhaust airs by 96?% H2SO4 and the capacity of the absorbent were determined. The practicability and robustness of the developed scrubber system using 96?% H2SO4 will allow its easy applicability in API production processes.