X-ray photoelectron spectroscopy, field emission scanning electron microscopy, Raman and photoluminescence spectroscopy were used to evaluate the surface properties of n-type InAs (111)A etched in a 1% Br-methanol solution. Etching completely removes the native oxides from the surface and enhances the photoluminescence response. The adsorption of bromine onto the InAs surface leads to the formation of In-Br-x and As-Br-x bonds (x = 1, 2, 3) as inferred from changes in the In 3d(3/2:5/2) and As 3d core level binding energies. The etch rate is found to decrease due to strong anisotropic effects and the high volatility of the bromine species. A 1 min Br-methanol etch was found to enhance the photoluminescence intensity by a factor of 3, probably due to a reduction in the surface state density upon de-oxidation of the surface. This is thought to be due to reductions in the surface state density. The presence of native oxides enhances both the surface accumulation layer and the surface state density. (C) 2012 Elsevier B.V. All rights reserved.