전계효과트랜지스터의 생명공학 응용

손영수; Young-Soo Sohn

Applied Chemistry for Engineering, Vol.24, No.1, 1-9, February, 2013

Export Citation

전계효과트랜지스터의 생명공학 응용

Field Effect Transistors for Biomedical Application

손영수^†

대구가톨릭대학교 의공학과

Young-Soo Sohn^†

Department of Biomedical Engineering, Catholic University of Daegu, Gyeongbuk 712-702, Korea

E-mail:

초록

의료의 패러다임이 질병 치료에서 질변 예방 및 조기 진단으로 변화하면서 미량의 생분자를 측정할 수 있는 기술에 대한 수요가 증가하고 있다. 미량의 생분자를 측정할 수 있는 다양한 기술이 존재하는데 여기서는 성숙된 반도체 기술을 이용한 바이오센서에 대해 언급하고자 한다. 이의 이해를 돕기 위해 반도체의 기본 소자인 MOSFET (Metal-oxide-semiconductor field-effect transistor)의 구조와 원리를 소개하고, 이를 응용한 ISFET (Ion sensitive FET), BioFET (Biologically modified FET), Nanowire FET, 그리고 IFET (Ionic FET)에 대한 소개와 이의 생명공학에 대한 응용에 대해 논하고자 한다.

As the medical paradigm is changing from disease treatment to disease prevention and an early diagonosis, the demand to develop techniques for the detection of minute concentrations of biomolecules is increasing. Among the various techniques to sense the minute concentration of biomolecules, the biosensors utilizing the matured semiconductor techniques are presented here. To understand such biosensors, the structure and working principle of a MOSFET (Metal-oxide-semiconductor field-effect transistor) which is the basic semiconductor device is firstly introduced, and then the ISFET (Ion sensitive FET), BioFET (Biologically modified FET), Nanowire FET, and IFET (Ionic FET) are introduced, and their applications to biomedical fields are discussed.

Keywords:MOSFET;ISFET;BioFET;Nanowire FET;IFET

[References]

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Bergveld P, IEEE Trans. Biomed. Eng., BME-17, 70 (1970)
Bergveld P, Sens. Actuators B., 88, 1 (2003)
http://www.sentron.nl/sensors/isfet-ph-sensors/.
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van den Berg A, Bergveld P, Reinhoudt DN, Sudholter EJR, Sens. Actuators B., 8, 129 (1985)
Sohn BK et. al., Sensor Engineering, 195, Iljinsa, Seoul, Korea (2012)
Niu MN, Ding XF, Tong QY, Sens. Actuators B., 37, 13 (1996)
Chou JC, Weng CY, Mater. Chem. Phys., 71(2), 120 (2001)
Kwon DH, Cho BW, Kim CS, Sohn BK, Sens. Actuators B., 34, 441 (1996)
Morgenshtein A, Sudakov-Boreysha L, Dinnar U, Jakobson CG, Nemirovsky Y, Sens. Actuators B., 98, 18 (2004)
Sohn BK, Cho BW, Kim CS, Kwon DH, Sens.Actuators B., 41, 7 (1997)
Chunga WY, Yang CH, Pijanowskac DG, Grabiec PB, Torbicz W, Sens. Actuators B., 113, 555 (2006)
Schoning MJ, Poghossian A, Analyst., 127, 1137 (2002)
Park KY, Sohn YS, Kim CK, Kim HS, Bae YS, Choi SY, Biosens. Bioelectron., 23, 1904 (2008)
Sohn SK, Lee SK, Choi SY, Sensor Lett., 5, 421 (2007)
Sohn YS, Kim CK, Choi SY, Sensor Lett., 7, 640 (2009)
Kim DS, Jeong YT, Park HJ, Shin JK, Choi P, Lee JH, Lim G, Biosens. Bioelectron., 20, 69 (2004)
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Gao Z, Agarwal A, Trigg AD, Singh N, Fang C, Tung CH, Fan Y, Buddharaju KD, Kong J, Anal. Chem., 79, 3291 (2007)
Patolsky F, Timko BT, Zheng G, Lieber CM, MRS Bull., 32, 142 (2007)
Kim A, Ah CS, Yu HY, Yang JH, Baek IB, Ahn CG, park CW, Jun MS, Lee S, Appl. Phys. Lett., 91, 103901 (2007)
Wang WU, Chen C, Lin KH, Fang Y, Lieber CM, Proc. Natl. Acad. Sci., 102, 3208 (2005)
Stern E, Klemic JK, Routenberg DA, Wyrembak PN, Turner-Evans DB, Hamilton AD, LaVan DA, Fahmy TM, Reed MA, Nature Lett., 445, 519 (2007)
Stern E, Wagner R, Sigworth FJ, Breaker R, Fahmy TM, Reed MA, Nano Lett., 7, 3405 (2007)
Gupta PK, Trends Biotechnol., 26, 602 (2008)
Kim T, Pak JJ, J. Sens. Sci. Technol., 21, 359 (2012)
Venkatesan BM, Bashir R, Nature Nanotech., 6, 615 (2011)
Tsutsui M, Taniguchi M, Yokota K, Kawai T, Nature Nanotech., 5, 286 (2010)
Liang X, Chou SY, Nano Lett., 8, 1472 (2008)
Postma HWC, Nano Lett., 10, 420 (2010)
Singer A, Wanunu M, Morrison W, Kuhn H, Frank-Kamenetskii M, Meller A, Nano Lett., 10, 738 (2010)
Storm AJ, Chen JH, Ling XS, Zandbergen HW, Dekker C, Nat. Mater., 2, 537 (2003)
Venkatesan BM, Shah AB, Zuo JM, Bashir R, Adv. Funct. Mater., 20(8), 1266 (2010)
Liu HT, He J, Tang JY, Liu H, Pang P, Cao D, Krstic P, Joseph S, Lindsay S, Nuckolls C, Science, 327(5961), 64 (2010)
Fan R, Karnik R, Yue M, Li D, Majumdar A, Yang P, Nano Lett., 5, 1633 (2005)
Nam SW, Rooks MJ, Kim KB, Rossnagel SM, Nano Lett., 9, 2044 (2009)

[Referenced By]

[1] Streetman BG, Banerjee SK, Solid State Electronic Devices, 6th Ed., 239, Pearson Prentice Hall, New Jersey (2006)

[2] Bergveld P, IEEE Trans. Biomed. Eng., BME-17, 70 (1970)

[3] Bergveld P, Sens. Actuators B., 88, 1 (2003)

[4] http://www.sentron.nl/sensors/isfet-ph-sensors/.

[5] Bousse L, Bergveld P, Sens. Actuators B., 6, 65 (1984)

[6] van den Berg A, Bergveld P, Reinhoudt DN, Sudholter EJR, Sens. Actuators B., 8, 129 (1985)

[7] Sohn BK et. al., Sensor Engineering, 195, Iljinsa, Seoul, Korea (2012)

[8] Niu MN, Ding XF, Tong QY, Sens. Actuators B., 37, 13 (1996)

[9] Chou JC, Weng CY, Mater. Chem. Phys., 71(2), 120 (2001)

[10] Kwon DH, Cho BW, Kim CS, Sohn BK, Sens. Actuators B., 34, 441 (1996)

[11] Morgenshtein A, Sudakov-Boreysha L, Dinnar U, Jakobson CG, Nemirovsky Y, Sens. Actuators B., 98, 18 (2004)

[12] Sohn BK, Cho BW, Kim CS, Kwon DH, Sens.Actuators B., 41, 7 (1997)

[13] Chunga WY, Yang CH, Pijanowskac DG, Grabiec PB, Torbicz W, Sens. Actuators B., 113, 555 (2006)

[14] Schoning MJ, Poghossian A, Analyst., 127, 1137 (2002)

[15] Park KY, Sohn YS, Kim CK, Kim HS, Bae YS, Choi SY, Biosens. Bioelectron., 23, 1904 (2008)

[16] Sohn SK, Lee SK, Choi SY, Sensor Lett., 5, 421 (2007)

[17] Sohn YS, Kim CK, Choi SY, Sensor Lett., 7, 640 (2009)

[18] Kim DS, Jeong YT, Park HJ, Shin JK, Choi P, Lee JH, Lim G, Biosens. Bioelectron., 20, 69 (2004)

[19] Wang L, Estrela P, Huq E, Li P, Thomas S, Ferrigno PK, Paul D, Adkin P, Migliorato P, Microelectron. Eng., 47, 235 (1998)

[20] Ishige Y, Shimoda M, Kamahori M, Biosens. Bioelectron., 24, 1096 (2009)

[21] Kim DS, Park JE, Shin JK, Kim PK, Lim G, Shoji S, Sens. Actuators B., 117, 488 (2006)

[22] Cui Y, Wei Q, Park H, Lieber CM, Science., 293, 1289 (2001)

[23] Curreli M, Zhang R, Ishikawa FN, Chang HK, Cote RJ, Zhou C, Thompson ME, IEEE Trans. Nanotechnol., 7, 651 (2008)

[24] Gao Z, Agarwal A, Trigg AD, Singh N, Fang C, Tung CH, Fan Y, Buddharaju KD, Kong J, Anal. Chem., 79, 3291 (2007)

[25] Patolsky F, Timko BT, Zheng G, Lieber CM, MRS Bull., 32, 142 (2007)

[26] Kim A, Ah CS, Yu HY, Yang JH, Baek IB, Ahn CG, park CW, Jun MS, Lee S, Appl. Phys. Lett., 91, 103901 (2007)

[27] Wang WU, Chen C, Lin KH, Fang Y, Lieber CM, Proc. Natl. Acad. Sci., 102, 3208 (2005)

[28] Stern E, Klemic JK, Routenberg DA, Wyrembak PN, Turner-Evans DB, Hamilton AD, LaVan DA, Fahmy TM, Reed MA, Nature Lett., 445, 519 (2007)

[29] Stern E, Wagner R, Sigworth FJ, Breaker R, Fahmy TM, Reed MA, Nano Lett., 7, 3405 (2007)

[30] Gupta PK, Trends Biotechnol., 26, 602 (2008)

[31] Kim T, Pak JJ, J. Sens. Sci. Technol., 21, 359 (2012)

[32] Venkatesan BM, Bashir R, Nature Nanotech., 6, 615 (2011)

[33] Tsutsui M, Taniguchi M, Yokota K, Kawai T, Nature Nanotech., 5, 286 (2010)

[34] Liang X, Chou SY, Nano Lett., 8, 1472 (2008)

[35] Postma HWC, Nano Lett., 10, 420 (2010)

[36] Singer A, Wanunu M, Morrison W, Kuhn H, Frank-Kamenetskii M, Meller A, Nano Lett., 10, 738 (2010)

[37] Storm AJ, Chen JH, Ling XS, Zandbergen HW, Dekker C, Nat. Mater., 2, 537 (2003)

[38] Venkatesan BM, Shah AB, Zuo JM, Bashir R, Adv. Funct. Mater., 20(8), 1266 (2010)

[39] Liu HT, He J, Tang JY, Liu H, Pang P, Cao D, Krstic P, Joseph S, Lindsay S, Nuckolls C, Science, 327(5961), 64 (2010)

[40] Fan R, Karnik R, Yue M, Li D, Majumdar A, Yang P, Nano Lett., 5, 1633 (2005)

[41] Nam SW, Rooks MJ, Kim KB, Rossnagel SM, Nano Lett., 9, 2044 (2009)