In this paper, a parallel double-effect or heat integrated organosilicon monomer distillation scheme is simulatively proposed with the aid of computer simulation to research the effect of heat integration on exergy loss of distillation process. The x-y diagrams of three groups of key components are drawn to confirm the feasibility of heat coupling. The total exergy loss of this scheme is calculated. The result shows that the heat integrated scheme presents 40.41% less exergy loss than the normal scheme. To make a further optimization, a sensitivity analysis is done to seek opportunities of further improving the operation parameters. The exergy loss distribution through trays of the low removal column is drawn to verify a large proportion of exergy loss in rectifying section. Then the operation condition of the condenser is changed to reduce the exergy loss from trays. (C) 2012 Elsevier Ltd. All rights reserved.