Interdigitated microstructured electrode arrays of gold or silver bands were used as substrates for the electrodeposition of crystalline ZnO thin films under pulsed galvanostatic conditions from aqueous Zn(NO3)(2) solutions. For current densities below the limiting current density, homogenous films of ZnO were obtained as proven by scanning electron and confocal laser microscopy. For current densities greater than those limited by the diffusion of Zn2+ and NO3-, strongly dendritic structures were formed. Film growth was analyzed based on the duplex diffusion layer model. The influence of convective diffusion was directly observed when only one set of electrode bands was polarized during deposition. By use of an underlying gate electrode in the substrate, field-effect measurements were performed to electrically characterize the samples. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.041212jes] All rights reserved.