Advanced Materials, Vol.25, No.14, 2078-2083, 2013
Organic Vapor Passivation of Silicon at Room Temperature
A simple, inexpensive, efficient, and scalable method to create air-stable organic surface passivation layers on silicon using a vapor-phase treatment is demonstrated. A variant of initiated chemical vapor deposition is used to synthesize a thin film that acts as both a passivation layer and an antireflective coating. The lowest surface recombination velocity reported to date is achieved and maintained during prolonged exposure to air.
Keywords:organic passivation of silicon surfaces;antireflective coatings;chemical vapor deposition;low surface recombination velocity;air-stable