If the silicon industry is to successfully integrate ZnO nanowires (NWs) into existing devices to fully utilise the piezoelectric or optical properties of ZnO NWs, then a detailed understanding of the effect of metal interconnects on the morphology of the NWs during growth needs to be obtained. In this study, ZnO NWs were hydrothermally grown at 90 A degrees C on Au, Ni and a Si substrate control to mimic the typical surfaces of a MetalMUMPs MEMS chip. The growth rate was significantly affected by the metal film below the ZnO seed layer, which was mainly attributed to changes in the roughness and grain size of the seed layer deposited, with the growth rate decreasing with increasing roughness. The growth rate on Si and Au surfaces also increased when isolated from the Ni samples, suggesting that Ni cations released in the solution could also inhibit growth by electrostatically attaching to the NWs surface and acting as a barrier to the incorporation of zinc ions. Furthermore, photoluminescence studies show the addition of metal layers to the substrate reduces the optical quality of the produced ZnO NWs.