A method for simultaneously patterning and functionalizing thin poly(2-hydroxyethyl methacrylate) films through a reactive silane infusion based wrinkling is developed. Wrinkled patterns with tunable wavelengths on submicrometer size are easily produced over large area surfaces and can express a wide variety of chemical functional groups on the surface. The characteristic wavelength of wrinkling scales linearly with initial film thickness, in agreement with a gradationally swollen film model. Results from X-ray photoelectron spectroscopy confirm that the wrinkled film is composed of two layers: a gradient cross-linked top layer and a uniform un-cross-linked bottom layer. The surface chemical properties of wrinkles can be easily tuned by infusion of different functional silanes. Hierarchical wrinkled patterns with micro/nano structure can be achieved by combining wrinkling with other simple lithography methods. Wrinkled nanopatterns can be used as a mold to transfer the topology to a variety of other materials using nanoimprint lithography.