Previous Article Next Article Table of Contents Journal of Chemical Engineering of Japan, Vol.30, No.2, 359-362, 1997 DOI10.1252/jcej.30.359 Export Citation Gas Permeation Through CVD Modified Anodic Alumina Membrane Onuki K, Nakajima H, Shimizu S, Nagoshi M Keywords:CHEMICAL-VAPOR-DEPOSITION;FILMS Please enable JavaScript to view the comments powered by Disqus.