Thanks to their excellent mechanical properties as well as interesting electrical characteristics, carbon nanotubes are among the most widely used materials for the study of electromechanical properties. This review paper presents the physical properties and the potential applications of carbon nanotube based nanoelectromechanical devices. We present an overview of fabrication methods followed by a discussion of the physical properties of CNT-NEMS. Finally some potential applications are discussed. (C) 2013 Elsevier B.V. All rights reserved.