Delamination of the cathode/electrolyte interface is an important degradation phenomenon in solid oxide fuel cells (SOFCs). While the thermal stress has been widely recognized as one of the major reasons for such delamination failures, the role of chemical stress does not receive too much attention. In this paper, a micro-model is developed to study the cathode/electrolyte interfacial stresses, coupling oxygen ion transport process with structural mechanics. Results indicate that the distributions of chemical stress are very complicated at the cathode/electrolyte interface and show different patterns from those of thermal stress. The maximum principal stresses take place at the cathode/electrolyte interface and are affected by the distribution of oxygen vacancy concentration on the cathode particle surface. The model is able to readily study complicated interfacial stresses in SOFCs, which otherwise would be difficult for experimental techniques. (C) 2013 The Electrochemical Society. All rights reserved.