In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of -0.1 to -2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 degrees C and 700 degrees C for 90 min in vacuum, the films reveal no phase transformation. (C) 2012 Elsevier B. V. All rights reserved.