Microstructure and cyclic high temperature oxidation behavior of nanostructured Co-Al coatings on Superni-718 substrate have been investigated. Cyclic high temperature oxidation tests were conducted on uncoated and coated samples at peak temperatures of 800 degrees C and 900 degrees C for up to 100 thermal cycles between the peak and room temperatures. The results showed that bare substrate has higher oxidation resistance at 800 degrees C as compared to 900 degrees C and coated sample has slightly higher oxidation resistance at 900 degrees C. The external scale of both coated sample exhibited good spallation resistance during cyclic oxidation testing at both temperatures. The improvement in oxide scale spallation resistance is believed to be related to the fine-grained structure of the coating. Nanostructured Co-Al coatings on Superni-718 substrate were deposited by DC/ RF magnetron sputtering. FE-SEM/ EDS and XRD were used to characterize the morphology and formation of different phases in the coatings, respectively. The Co-Al coating on superalloy substrate showed better performance of cyclic high temperature oxidation resistance due to its possession of beta-CoAl phase as Al reservoir and the formation of Al2O3 and spinel phases such as CoCr2O4 and CoAl2O4 in the scale. The oxidation results confirmed an improved oxidation resistance of the Co-Al coating on superalloy as compared to bare substrate up to 100 cycles. (C) 2012 Elsevier B.V. All rights reserved.