Alumina substrates are commonly used for various micro-/nanoelectromechanical systems (MEMS/NEMS). For efficient and lifetime longevity of these devices, lubricant films of self-assembled monolayers (SAMs) with nanometer thickness are increasingly being employed. In the present paper, we report preparation, tribological and stability investigations of alkylphosphonic acids on the alumina surface. The alkylphosphonic acids were prepared on the alumina surface using the liquid phase deposition method. The effectiveness of modification of the alumina surface by alkylphosphonic acids was investigated using water contact angle measurements, secondary ion mass spectrometry, X-ray photoelectron and infrared spectroscopy. Frictional behavior in milinewton load range was studied by microtribometry. It is shown that surface modification of the alumina surface by alkylphosphonic acids reduces the coefficient of friction values compared to the unmodified alumina. In comparison to the non-modified alumina surface, all tested alkylphosphonic acids cause a decrease in the friction coefficients in friction tests for counterparts made from different materials, such as steel, zirconia and silicon nitride. It is also found that the alumina surface modified by alkylphosphonic acids with longer chain has a higher degree of hydrophobicity and lower coefficient of friction. The best frictional properties are obtained for the system consisting of the alumina surface modified by n-octadecylphosphonic acid and silicon nitride counterpart. Stability tests in different environmental conditions: laboratory, acidic and alkaline solutions were also monitored. (C) 2013 Elsevier B.V. All rights reserved.