The pure tetragonal perovskite (Pb0.8Ca0.2)TiO3 (PCT) thin films deposited on (1 1 1)Pt/Ti/SiO2/Si substrate were successfully achieved by a sol-gel route, and the influence of pyrolysis temperature on crystallization behaviors and electric properties of the PCT films was investigated. It was found that the film pyrolyzed at 450 degrees C could be crystallized at temperature as low as 450 degrees C, while the film pyrolyzed at 350 degrees C is amorphous under the same crystallization temperature. It was also found that the PCT films pyrolyzed at different temperatures could be fully crystallized when the crystallization temperature was raised to 600 degrees C, and compared to the film pyrolyzed at 350 degrees C, the film pyrolyzed at 450 degrees C exhibited higher (1 0 0) orientation and possessed enhanced electric properties (remanent polarization similar to 19.5 mu C/cm(2), piezoelectric constant similar to 125 pm/v, pyroelectric coefficient similar to 310 mu C/m(2)K). (c) 2013 Elsevier B.V. All rights reserved.