A simple, low-cost and safe method to obtain thin carbon films is described. Deposition of graphen-like films on dielectrics, excluding the process of transfer from a metal surface, is of special interest. The properties of carbon nanomaterial are studied. The paper reports the data of electrical and optical measurements, the results of transmission and scanning electron microscopy and Raman spectroscopies. It is found that the growth conditions strongly affect the quality of products. The emphasis is placed on the influence of water content in the feedstock on the properties of the films obtained. An explanation of this influence is proposed. (C) 2012 Elsevier B.V. All rights reserved.