The nanostructuration ability of low glass transition temperature (T-g) azo-polysiloxanes films is investigated at working temperatures close or higher than the film T-g. The behavior of materials incorporating additional side chain nitrobenzene or naphthalene groups and as a result presenting different T-g is compared in terms of the surface modulation dynamics and stability of the induced topographic modifications. This comparison is carried out under light exposure and in dark environment. We demonstrate the ability to optically generate surface modulations on these materials even at operating temperatures corresponding to the film T-g. Along with a modification of the opto-mechanic properties correlated with the materials chemical structure, a collapse of the surface structures occurring with different dynamics in materials of similar T-g is highlighted. These observations suggest the existence of an additional mechanism rather than a purely thermal redistribution of the polymer chains in the films. (C) 2013 Elsevier B. V. All rights reserved.