Applied Surface Science, Vol.292, 551-555, 2014
Room temperature NO2-sensing properties of WO3 nanoparticles/porous silicon
WO3 nanoparticles were synthesized by sol-gel method with tungsten hexachloride (WCl6) as precursor and deposited onto porous silicon and alumina substrates by dip-coating. The morphology and crystal structure of samples were investigated by means of field emission scanning electron microscope and X-ray diffractometer. It is the experimental results demonstrated by gas sensing tests that WO3 nanopartides combining with the substrate of porous silicon presented an improved NO2-sensing property at room temperature. Compared to WO3 deposited on alumina working above 100 degrees C, the WO3 nanoparticles/porous silicon exhibited higher properties upon exposure to sub-ppm concentrations of NO2 gas at room temperature. Additionally, the NO2-sensing performance of WO3 nanoparticles/porous silicon was enhanced markedly, in comparison to pure porous silicon. The mechanism of WO3/porous silicon composite structure on the NO2 sensing was explained in detail. (C) 2014 Elsevier B.V. All rights reserved.