In this work silicon/multi walled carbon nanotube (MWCNT) composite anodes were produced via direct current (DC) magnetron sputtering of silicon onto carbon nanotube papers (buckypapers). The amount of silicon in the composite anodes was varied by using different sputtering powers of 150W, 175W, 200W and the effect on the cell performance was studied. Phase analysis was conducted with X-ray diffraction (XRD) technique and Raman spectroscopy. Field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM) analyses were employed for morphological characterization of anodes. Energy dispersive spectroscopy (EDS) mapping was used to observe silicon distribution on the buckypapers. Cyclic voltammetry (CV) tests were carried out to reveal reversible reactions between silicon and lithium. Galvanostatic charge/discharge technique was employed to determine the cyclic performance of anodes. Electrochemical impedance spectroscopy technique was used to understand the relation between cyclic performance and internal resistance of cells. The results showed capacity retention of silicon anodes was improved with composite structure and higher capacity values were achieved than graphite anodes. The silicon/carbon nanotube composite produced with 150W showed the best cycle stability after 100 cycles of galvanostatic charge/discharge tests with capacity value of 620 mAh g(-1). (C) 2014 Elsevier B.V. All rights reserved.