Inductively coupled plasma was used to study the removal of NOx from NO/N-2/O-2/C2H4 mixtures in Co-ZSM-5 packed radio frequency (RF) plasma. Laser-induced fluorescence (LIF), optical emission spectroscopy (OES), and mass spectroscopy temperature programmed desorption (MS-TPD) were applied to investigate the effects of the plasmas parameters, such as discharge power (P-dis), discharge pressure (p) on the concentration of reactive species in the gas phase or stable surface species formed over catalyst active sites. Rotational and vibrational temperatures of N-2 in Co-ZSM-5 packed and no packed RF plasmas were also analyzed. Possible mechanism for the NOx-selective catalytic reduction (SCR) with C2H4 over Co-ZSM-5 packed RF plasmas was addressed. (C) 2013 Elsevier B.V. All rights reserved.