In this study, wetting properties of a hierarchical structure using a silicon micro-tip array covered with ZnO nanowire are characterized, and compared with hierarchical structures composed of micro-pillars for micro-scale roughness. The superhydrophobicity of a surface can be efficiently enhanced by using a micro-tip array, compared with a micro-pillar structure, because a micro-tip structure with high aspect ratio and small apex radius can significantly reduce fractions of liquid droplet area in contact, maintaining the droplet in the regime of the Cassie state. The micro-tip array was simply fabricated by combining anisotropic and isotropic silicon etching processes with one-step photolithography and a single etch mask. The measured height and aspect ratio of the fabricated micro-tip was around 40 mu m and 8, respectively, when the center-to-center distance between micro-tips was 30 mu m. The maximum CA on the hierarchical surface using the micro-tip array was measured to be 165.0 +/- 2.3 degrees with a period of 30 mu m, while the hierarchical surface using the micro-pillar array showed the maximum CA of 158.6 +/- 1.1 degrees with 20 mu m-diameter and 70 mu m-gap between micro-pillars. The smallest CAH on the hierarchical micro-tip array was measured to be 5.0 +/- 0.3 degrees for the center-to-center distance between micro-tips of 30 mu m. (C) 2014 Elsevier B.V. All rights reserved.