A model of inhomogeneous pores filling during electrodeposition of ordered metal nanowire arrays is developed. The model takes into consideration the ionic transfer both in the varying diffusion layer in the pores and in the diffusion layer above the template, which is determined by the external hydrodynamic conditions. The model takes into account the kinetics of electrochemical reaction (the Tafel equation) and the diffusion transfer of metal cations both in the pores and in the outer diffusion layer. In the quasi-steady-state approximation, two problems were considered. The problem for the case that the initial length of one pore differs from that of all other pores is solved analytically. The problem for the case that the initial lengths of all pores are different is solved numerically. The time dependences of unfilled pore length are obtained for various overpotentials and various initial distributions of pore length. It is found that the pores filling inhomogeneity increases with increasing overpotential. (C) 2013 Elsevier Ltd. All rights reserved.