Hydrogen is considered to be the ideal energy carrier in the near future. It would be of great importance to obtain experimental data regarding the interaction of hydrogen with materials as they could assist to better realize the occurring phenomena. More specifically, quantification of hydrogen in materials could help to modify the materials processing conditions in the field of hydrogen generation, storage and utilization for the final goal of energy generation. Measurement of hydrogen in materials has always been a challenge in front of researchers. In this research work, hydrogen analysis has been performed by "Elastic Recoil Detection" (ERD) technique using the a-beam of the Van de Graaff accelerator of Nuclear Science and Technology Research Institute (NSTRI). Capability of ERD for quantification of hydrogen in carbon nanotube, H-treated Ti thin layer as well as in semi-conducting sample of Si single crystal prepared under certain conditions has been shown. Capability of ERD for characterization of advanced materials is shown by hydrogen quantification or hydrogen concentration depth profiling in each representative example. (C) 2010 Professor T. Nejat Veziroglu. Published by Elsevier Ltd. All rights reserved.