A fully-integrated micro PEM fuel cell system with a NaBH4 hydrogen generator was developed. The micro fuel cell system contained a micro PEM fuel cell and a NaBH4 hydrogen generator. The hydrogen generator comprised a NaBH4 reacting chamber and a hydrogen separating chamber. Photosensitive glass wafers were used to fabricate a lightweight and corrosion-resistant micro fuel cell and hydrogen generator. All of the BOP such as a NaBH4 cartridge, a micropump, and an auxiliary battery were fully integrated. In order to generate stable power output, a hybrid power management operating with a micro fuel cell and battery was designed. The integrated performance of the micro PEM fuel cell with NaBH4 hydrogen generator was evaluated under various operating conditions. The hybrid power output was stably provided by the micro PEM fuel cell and auxiliary battery. The maximum power output and specific energy density of the micro PEM fuel cell system were 250 mW and 111.2 W h/kg, respectively. Copyright (C) 2011, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.