Monodispersed, submicron-sized Janus ORMOSIL particles with multiple functional groups were prepared by the selective surface reaction of a monolayer film formed at a hexane-water interface. A well-ordered monolayer film was obtained by self-assembly of ORMOSIL particles with multiple functional groups at hexane-water interface. The photopolymerization of an ordered monolayer containing ORMOSIL particles yields a rigid film strong enough to maintain its integrity for transfer and further chemical reaction. The chemical reaction of this ordered film with organic and inorganic functional groups produced Janus ORMOSIL particles with multiple functional groups. The morphologies, structures, and chemical compositions of monolayer films and Janus ORMOSIL particles were characterized by FT-IR, solid state NMR, X-ray diffraction (XRD), optical microscopy (OM), electron microscopies (SEM and TEM), and confocal laser scanning microscopy. (C) 2011 Elsevier Inc. All rights reserved.