Chromium disilicide (CrSi2) nanostructures were grown by the exposure of Si substrates to CrCl2 vapor at atmospheric pressure, and the growth condition dependence on the morphological and structural properties of CrSi2 was systemically investigated. The various structures of CrSi2, such as microrods, nanowire bundles along with microrods and dendritic nanowire structures, have been grown. It was found that the Si substrate temperature and the quantity of the CrCl2 source materials significantly affect the morphological and structural properties of the CrSi2 structures. The structural evolution of CrSi2 has been discussed on the basis of thermodynamic reactions, vapor deposition growth and dendritic growth phenomena. This growth process provides a simple and controllable method to grow novel nano-scaled structures of transition metal silicides for technological use. (C) 2012 Elsevier B.V. All rights reserved.