화학공학소재연구정보센터
Journal of Crystal Growth, Vol.370, 101-104, 2013
GaN based LEDs with semipolar QWs employing embedded sub-micrometer sized selectively grown 3D structures
We present LED structures with embedded semipolar {10 (1) over bar1} quantum wells based on 2-inch c-plane GaN templates grown on c-plane sapphire substrates. Using selective area epitaxy, we achieved periodic GaN stripe structures with triangular cross-section with dimensions of a few 100 nm on continuous areas of several cm(2). These structures exhibit semipolar side facets on which GaInN quantum wells with reduced piezoelectric fields have been deposited. The small dimensions of these structures allow complete embedding by GaN cladding layers eventually resulting in a flat c-plane surface. Consequently, our approach allows conventional device processing to be applied. Structural, optical, and electrical characterization is presented and the influence of mask material and pattern on the performances of LED structures is investigated. (C) 2012 Elsevier B.V. All rights reserved.