Journal of Crystal Growth, Vol.370, 217-220, 2013
AlGaInAsPSb-based high-speed short-cavity VCSEL with single-mode emission at 1.3 mu m grown by MOVPE on InP substrate
In this paper we present the first InP-based short-cavity Vertical-Cavity Surface-Emitting Laser with an AlGaInAsP/GaInAsP active region and a re-grown and structured GaAs0.51Sb:C/Ga0.47InAs:Si buried tunnel junction (BTJ), which serves as current aperture, grown by LP-MOVPE. We achieved over 1 mW single-mode continuous-wave (cw) emission at around 1.3 mu m wavelength and room-temperature. The small-signal modulation bandwidth exceeds 7.5 GHz, which is appropriate for 10 Gb/s data transmission, and the series resistance is as low as 24 Omega. The latter value indicates around three times lower dissipated power consumption than comparable MOVPE grown InP-based VCSELs. (C) 2012 Elsevier B.V. All rights reserved.
Keywords:Metalorganic vapor phase epitaxy;Antimonides;Phosphides;Semiconducting III-V materials;Laser diodes