Journal of Crystal Growth, Vol.370, 288-292, 2013
MOVPE growth of semi-polar GaN light-emitting diode structures on planar Si(112) and Si(113) substrates
We present semi-polar GaN light-emitting diode (LED) structures grown on non-patterned Si(112) and Si(113) substrates by metal organic vapor phase epitaxy. Cathodoluminescence and field emission scanning electron microscopy are used for sample characterization. A correlation between the structural and optical properties of the semi-polar GaN LED structures is observed. In samples, which were simultaneously grown on Si(112) and Si(113) under growth conditions optimized for Si(112), we observed that structures on Si(112) consist of a relatively smooth surface but those on Si(113) have a large number of surface pits with a three dimensional growth mode of the GaN layers resulting in a rough GaN surface. The growth conditions were further optimized to obtain smooth GaN layers on Si(113) and compared to the sample on Si(112). (C) 2012 Elsevier B.V. All rights reserved.
Keywords:Metalorganic vapor phase epitaxy;Nitrides;Semiconducting III-V materials;Light-emitting diodes