We investigated solid phase epitaxy (SPE) of EuTiO3 thin films on SrTiO3 (100) substrates with different oxygen contents. Amorphous EuTiOx thin films were deposited onto SrTiO3 substrates by pulsed laser deposition and crystallized by subsequent annealing in a vacuum chamber. A pure perovskite EuTiO3 phase was obtained on the reduced (i.e., oxygen-depleted SrTiO3) substrate, while an Eu2Ti2O7 phase was obtained on the oxygen-rich one. These results suggest that oxygen migration occurs between the EuTiOx film and SrTiO3 during SPE. The electric properties of the fabricated EuTiO3 thin films also depended on the amount of oxygen vacancies in the SrTiO3 substrate. (c) 2013 Elsevier B.V. All rights reserved.