화학공학소재연구정보센터
Journal of Crystal Growth, Vol.381, 134-138, 2013
The nu/G criterion for defect-free silicon single crystal growth from a melt revisited: Implication for large diameter crystals
Traditionally the critical value Gamma(crit) of the Gamma ratio of the pulling speed upsilon over the thermal gradient G at the melt-solid interface needed to grow defect free silicon is assumed to be a constant for a given crystal doping and resistivity. Recently it was however shown that Gamma(crit) depends on stress and thus alson on G. in particular on its derivative with respect to the distance from the melt-solid interface. As G also depends on v, a process window exists for the critcal pulling speed which depends both on the crystal radius and on Gamma(crit). The implications for the development of pulling processes for large diameter defect free silicon crystals are discussed. (C) 2013 Elsevier B.V. All rights reserved.