The tetragonal chalcopyrite phases CuInSe2, CuGaSe2 and Culn(0.7)Ga(0.3)Se(2) have been deposited onto the glass substates by Aerosol Assisted Chemical Vapour Deposition (AACVD) from a mixture of [M-x((Pr2PSe2)-Pr-i)(y)] complexes (M = In, Ga, Cu) at temperatures between 300 degrees C and 500 degrees C. The thin films were characterized by powder X-ray diffraction (p-XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The bulk compositional properties have been studied by energy dispersive X-ray (EDX) analysis. SEM and AFM studies demonstrate a significant variation in morphology of the deposited materials at different deposition temperatures. (C) 2014 Elsevier B.V. All rights reserved.