화학공학소재연구정보센터
Journal of Crystal Growth, Vol.401, 661-664, 2014
Investigation of TMIn pulse duration effect on the properties of InAlN/GaN heterostructures grown on sapphire by pulsed metal organic chemical vapor deposition
In this work, we report an experimental investigation of the effect of TMIn pulse duration on the properties of InAlN/GaN heterostructures grown on c-plane sapphire by pulsed metal organic chemical vapor deposition. It is found that the TMIn pulse duration significantly influences the structural and electron transport properties of InAlN/GaN heterostructures. With the increase of TMIn pulse duration from 0.1 to 0.4 min at intervals of 0.1 min, the indium content increases from 74% to 18.8%, and a nearly lattice-matched indium content of 17% is obtained at a TMIn pulse duration of 0.3 min. Simultaneously, an increase of electron mobility from 989 to 1538 cm(2)/V s and a reduction of two-dimensional electron gas (2DEG) density from 2.69 x 10(13) to 1.17 x 10(13)cm(-2) accompanied with the increase of TMIn pulse duration. In the case of 0.3 min, a high electron mobility of 1428 cm(2)/V s and a 2DEG density of 1.73 x 10(13) cm(-2) are achieved for nearly lattice-matched lnAlN/GaN heterostructures, along with a smooth surface morphology with a root mean square roughness value of 0.21 nm observed by atomic force microscopy in a 2 x 2 mu m(2) scan area (C) 2014 Elsevier B.V. All rights reserved.