Influence of Si substrate texturing on growth, microstuctural and electrochemical properties of lithium cobalt oxide (LiCoO2) cathode films was investigated. A batch of rf magnetron sputtered LiCoO2 films were prepared on both Au/Ti/SiO2/(polished) Si and AulTi/SiO2/(textured) Si substrates and the film properties were studied, systematically. As-grown films on polished Si substrates were exhibited partially ordered rock-salt structure with a very poor electrochemical performance. However, the as-grown films on textured Si substrates exhibited relatively predominant (0 0 3) orientation with R 3 m symmetry and exhibited an initial discharge capacity of 57.5 mu Ahcm(-2) mu m(-1) with an appreciable capacity fade rate of 0.07%, even after 50 cycles. Electrochemical performance of these films was in close comparison with the annealed (650 degrees C) LiCoO2 films of Au/Ti/SiO2/(polished) Si substrates. The experimental observations were thoroughly demonstrated and suggested that the as-grown LiCoO2 films on textured Si substrates can be useful for all types of 2D solid state Li-Lion microbattery applications. (C) 2013 Elsevier B.V. All rights reserved.