Manganese oxide thin films with various oxidation states (MnO, Mn3O4 and Mn2O3) have been prepared by pulsed laser deposition using a Mn target at different oxygen partial pressures. The structural and morphological features of the as-deposited thin films are characterized by X-ray diffraction, Raman, field emission scanning electron microscopy (FESEM). The oxidation states of Mn in different thin films are investigated by X-ray photoelectron spectroscopy for both Mn 2p and 3s levels. It is found that the structure, surface morphology, and Mn oxidation state of the thin films can be tuned by oxygen partial pressure during the deposition. As anode for thin film lithium-ion microbatteries, the Mn3O4 thin film electrode exhibits the largest reversible capacity up to 800 mAh g(-1) with good cycling stability and excellent rate capability. The promising electrochemical performance of the Mn3O4 thin film electrode indicates the potential application of Mn3O4 thin film anode in all solid-state thin film microbatteries. (C) 2013 Elsevier B.V. All rights reserved.