The effect of ion-beam bombardment with low energy Xe ions on the physical properties of 100Cr6 steel is reported. The modified region induced by the relative low energy ions (<1 key) extends orders of magnitude deeper than the stopping length of the impacting ions. The energy dependence of the indepth stress and the pattern formation is also verified. The formation of peculiar patterns on the treated surface is discussed by evoking the current model of surface instability produced by preferential sputtering and surface diffusion in metals. (C) 2014 Elsevier B.V. All rights reserved.